Test Grating for X-, Y- and Z-direction 55 kHz Microscopists and engineers using high

Microscopists and engineers using high performance SEMs or FIB systems will find this calibration test specimen useful

Each position also has an additional centre recess to avoid any contact with the grid support area and the block

Variety pack contains: 4 MESP-V2 probes

005 Ohm·cm

The fabrication process ensures excellent uniformity of the structures across the chip

Test Grating for X-, Y- and Z-direction 55 kHz Microscopists and engineers using highDESCRIPTION The TG3D 3000 20 test grating with its truly 3 Dimensional structure is intended for simultaneous calibration in X , Y and Z direction, lateral calibration of SPM scanners and detection of any lateral nonlinearity, hysteresis, creep and cross coupling effects. Structure: Si wafer with SiO2 layer for grating Pattern type: 3 Dimensional array of small squares Height: 20 1. 5nm Square size: 1. 5 0. 15m Period: 3 0. 05m Chip size: 5 x 5 x 0.